Next-generation "FT-IR SE50-ECO series" equipped with Thermo Fisher's FT-IR and JEL's sorter system
・ECO series supported applications: Epi-thickness(Si / SiC / SOl), Carbon / Oxygen concentration in silicon, Phosphorus / Boron concentration in BPSG film, Hydrogen concentration in SiN film, Fluorine concentration in silicon oxide film and Non-Diffusion Layer Thickness of wafers.
・OIP supported application: Oxygen concentration in ingots
SE50A-ECO 200SS
Compatible with 4-8 inches wafers Vacuum suction type robot transfer system from single cassette
SE50A-ECO 200DS
Compatible with 4-8 inches wafers Vacuum suction type robot transfer system from double cassettes
SE50A-ECO 200DSMIF
Compatible with 4-8 inches wafers Vacuum suction type robot transfer system from single cassette
SE50A-ECO 300SF
Compatible with 8-12 inches wafers Vacuum suction type robot transfer system from single FOUP
SE50A-ECO 300SFE
12 inches wafers
Edge grip type robot transfer system from single FOUP
SE50A-ECO 300SS
Compatible with 8-12 inches wafers Vacuum suction type robot transfer system from single cassette
SE50S-ECO
Compatible with 2-8 inches or 6-12 inches wafers
Stage type automatic transfer system
SE50A-OIP
Oxygen concentration measurement system for 202 mm or 302 mm diameter and total length up to 3000 mm ingots